Vesta, SEMATECH’s ATDF tout low-temp TiN films and "super high-k" films
July 11, 2007 - planetoid Technology Inc. and SEMATECH’s Advanced Technology Development Facility (ATDF) feature they are touting a unify of profession achievements: a nondamaging impact that allows accumulation of plasma-enhanced TiN films at 30% modify temperatures than customary methods, and a “super high-k” substance nearly twice the stuff unceasing than HfO2- and ZrO2-based films.