ST, SAES Getters partnership eyes booming MEMS gyroscope biz
May 17, 2007 - STMicroelectronics and the SAES Getters Group feature they module combine SAES’ PageWafer getter thin-film technology, utilised in high-vacuums in wafer-level prepacked MEMS devices, into ST’s next-generation MEMS gyroscopes, targeting consumer devices, gaming, and guidance devices.