SEMATECH, Veeco push EUV tool efforts
April 23, 2007 - SEMATECH is resource an added $2.4 meg send to hold Veeco Instruments Inc.’s R&D of its ion shine accumulation agency for ingest in extremity ultraviolet (EUV) lithography, conception of SEMATECH’s Mask Blank Development Center at the U. of town campus in New York.