Nikon touts shipment of 45nm immersion tool
February 28, 2007 - Nikon Corp. goldenwords says it has shipped its newest ArF dousing lithography scanner, the NSR-S610C, to an unnamed IC concern for 45nm creation impact and 32nm development. The activity came after a “one-year, head-to-head evaluation,” according to Kazuo Ushida, chair of Nikon Precision Equipment Co.