Matsushita touts 45nm production of AV LSIs
June 19, 2007 - Matsushita Electric Industrial Co. goldenwords says it has begun the “world[’s] first” accumulation creation of 45nm LSI chips at its works in Uozu, bicentric Japan, using ArF dousing lithography (NA>1) with “proprietary super-resolution improvement technology” and multilayer wiring using low-k dielectrics.