Cabot lobs CMP lawsuit at DuPont Air Products
January 19, 2007 - Fulfilling a prospect from a period ago, adventurer Microelectronics Corp. has officially filed jural state against DuPont Air Products NanoMaterials LLC (DA Nano) alleging that DA Nano’s chemical machinelike planarization (CMP) slurries transgress its patents, including ones for metal CMP.