AMS uncrates metrology systems for 3D, Cu/low-k stacks
July 19, 2007 - Advanced Metrology Systems (AMS, erst Philips AMS) has free threesome newborn metrology tools this week, substance model-based frequence (MBIR) metrology for 3D DRAM structures, and a opencast gesture grouping for multilayer measurements of copper/low-k films stacks.